Sefa-Ntiri, B.; Docker, P.; Ward, M.C.; Prewett, P.D.
(University of Cape Coast, 2005)
A finite element analysis (FEA) of surface lasmon polariton (SPP) assisted evanescent near field optical lithography (ENFOL) is described. A gold on silicon nitride nanostructured, low-stress, conformable mask is used to ...